TAI BDS3000 PPB Oxygen Detection
As the density of wafers produced within a semiconductor facility increases, so too does the stringent requirement to accurately monitor for oxygen contamination at or below parts-per-billion (ppb) levels.
In response to the increased importance of accurately and reliably detecting trace ppb leve...
Apollo Ammonia Scrubber
The system is required to deal with the exhaust stream from 6 MOCVD nitride reactors with a maximum combined ammonia flowrate of 500lts/min.
The plant utilises the proven IEM TurbulatorRR tube system thus cutting maintenance to an absolute minimum. In addition, the plant can be upgraded to have c...
Constellation Chemical Scrubber System
System introduction
This system is reliable and compact , and is maintained easily. This system can process toxic gases from 4 MOCVD reactors. The maximum flow is 10 L/Min Phosphine, 2ltrs/Min Arsine 200L/Min H2 and various metal organics and various Nitrogen purges. Additionally, the system is a...
Michell Pura
The Pura transmitter benefits from Michell's experience and expertise in the production and calibration of impedance dew-point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconduc...
Michell Pura Plus
The new Pura Plus is Michell Instruments response to latest changes in the wafer fabrication industry requirements for device size and specification. The Pura Plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multipl...
EMF ¢ó-¢õ MO Source
EMF utilises the proprietory DEOX(tm) process for the manufacture of Group III organometallics sources including:- DEOX(tm) TMAl, DEOX(tm) TMG, DEOX(tm) TMI and DEOX(tm) DEZn
The DEOX(tm) process eliminates oxygen and associated impurities leading to improved device results. Two in-house MOCVD...
CFS Cabinet
Design, Manufacture and Installation of Ultra High Purity Gas Control Systems.
CFS has worked closely with the Institute for Manufacturing at Cambridge University to improve the procurement and manufacturing operations associated with this client. Following the implementation of several lead manu...
ADT 7100
The 7100 family of 2" and 4" spindle dicing systems delivers a level of affordability and flexibility that is unprecedented in the industry.With four different models to choose from, each optimized for a specific range of applications, the 7100 Series covers the widest range of applications, offerin...
