Apollo Ammonia Scrubber
The system is required to deal with the exhaust stream from 8 MOCVD nitride reactors with a maximum combined ammonia flow of 600lts/min. Carrier gases will also be present.
The plant utilises the proven IEM TurbulatorRR tube system thus cutting maintenance to an absolute minimum. In addition, th...
Gemini Constellation Chemical Scrubber System
System introduction
This system is reliable and compact , and is maintained easily. This system can process toxic gases from 4 MOCVD reactors. The maximum flow is 10 L/Min Phosphine, 2ltrs/Min Arsine 200L/Min H2 and various metal organics and various Nitrogen purges. The final PH3 and AsH3 conten...
Michell Pura
The Pura transmitter benefits from Michell's experience and expertise in the production and calibration of impedance dew-point sensors. Incorporation of industry standard materials and manufacturing processes gives the first low cost transmitter suitable for large-scale integration into a semiconduc...
Michell Pura Plus
The new Pura Plus is Michell Instruments response to latest changes in the wafer fabrication industry requirements for device size and specification. The Pura Plus is an on-line trace moisture event sensor designed for UHP inert gas applications in semiconductor fabs to allow installation at multipl...
GE MTS5
The Moisture target series 5(MTS 5) analyzer is a single-channel analyzer measures moisture concentration in gases and non-aqueous liquids from trace to ambient levels. It is compatible with MIS,TF and M Series type moisture probes for industries including:
•Petrochemical
•Natural ...
GE MIS1
Combining the MIS 1 analyzer, the MIS probe, and our nondepleting oxygen cell creates a system capable of measuring as many as six points each of ambient to trace amounts of moisture and oxygen. Computer-enhanced response and a true ppbv scale are included for fast response and maximum resolution an...
EMF ¢ó-¢õ MO Source
EMF utilises the proprietory DEOX(tm) process for the manufacture of Group III organometallics sources including:- DEOX(tm) TMAl, DEOX(tm) TMG, DEOX(tm) TMI and DEOX(tm) DEZn
The DEOX(tm) process eliminates oxygen and associated impurities leading to improved device results. Two in-house MOCVD...
ORS ARC
The ORS ARC is a single beam wafer bow measurement tool.
The ARC has been developed to address the requirement to measure not only spherical bow but importantly non-spherical bow. The assumption that bow is always spherical has been shown to be erroneous. This feature is essential in enablin...
